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About ICMTS

The International Conference on Microelectronic Test Structures (ICMTS) is the premier conference devoted to the development, measurement and analysis of test structures providing a forum for designers and users of test structures to discuss recent developments and future directions The meeting is a IEEE conference, sponsored by the IEEE Electron Devices Society.

The conference will be held from 12 to 15 April 2021, at the Crowne Plaza at Playhouse Square in Cleveland, OH, USA

For more information on ICMTS including information on past conferences, please visit the permanent ICMTS website.


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