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“L'essentiel est invisible” - Fundamentals of Microelectronic Test Structure

Presenter: Prof Yoshio Mita University of Tokyo, Japan
Start: 09:10 (55 minutes)

Abstract

“L'essentiel est invisible pour les yeux” is a phrase of “Le Petit Prince” of Antoine de Saint-Exupery. The direct translation is “The essential is invisible for the eyes”. Also in microelectronics, the essential values are often invisible. In contrast to what was said in the story: “Men can see only with heart'”, microelectronic engineers can see essential parameters by means of test structures associated with test methods. Since 1980s, the semiconductor experts continuously proposed such Test Structures, especially through the IEEE ICMTS conference. The technological field now covers from critical dimension, process parameter, device parameter, modeling, and to reliability. The application field is now expanding from silicon semiconductor to microelectromechanical fields. This tutorial addresses from beginner to experts to share the principle and past significant contributions on Microelectronic Test Structures. The presenter puts his all effort to attract the audience for better understanding of the Test Structures, on behalf of the 1st awardee of UTokyo Faculty of Engineering Best Teaching Award.

Biography

“L'essentiel est invisible pour les yeux” is a phrase of “Le Petit Prince” of Antoine de Saint-Exupery. The direct translation is “The essential is invisible for the eyes”. Also in microelectronics, the essential values are often invisible. In contrast to what was said in the story: “Men can see only with heart'”, microelectronic engineers can see essential parameters by means of test structures associated with test methods. Since 1980s, the semiconductor experts continuously proposed such Test Structures, especially through the IEEE ICMTS conference. The technological field now covers from critical dimension, process parameter, device parameter, modeling, and to reliability. The application field is now expanding from silicon semiconductor to microelectromechanical fields. This tutorial addresses from beginner to experts to share the principle and past significant contributions on Microelectronic Test Structures. The presenter puts his all effort to attract the audience for better understanding of the Test Structures, on behalf of the 1st awardee of UTokyo Faculty of Engineering Best Teaching Award.