CHAIRMAN’S LETTER
On behalf of the steering and technical program committees, I take pleasure in welcoming you to the 2023 International Conference on Microelectronic Test Structures (ICMTS 2023) at the University of Tokyo in Tokyo, Japan on March 27-March 30, 2023. It is the 35th ICMTS as an international conference and the first in-person ICMTS after the remote ICMTS 2021 and ICMTS 2022 due to COVID-19. The in-person style is much-awaited for many ICMTS lovers since the conference's purpose is to bring together designers and users of test structures to discuss recent development and future directions.
In the past, many topics of the ICMTS were so-called advanced logic or memory technologies related. Many ideas for new test structures and new results were proposed and discussed in the ICMTS for the technologies. I think it was meeting the needs of the times. However, as the semiconductor role is becoming more important and is becoming more diversified, many researchers, engineers, and students have selected different topics for their research. As a result of the changes, topics of the ICMTS have become diversified. Topics of the ICMTS 2023 are the result of the changes and are meeting the needs of the time.
The technical program is scheduled to be held from March 28 to March 30 and consists of nine sessions containing thirty-six contributed papers. The nine sessions cover emerging memory, noise, power devices, measurement technique, matching & variability, yield and device optimization, MEMS & sensors, modeling, and novel materials. In addition to the thirty-six papers, two bonus presentations will be provided on March 29 for young researchers that have not familiar with making better papers and presentations.
On March 27, the conference is preceded by a one-day tutorial short course providing seven topics by a leading expert in each field, which many people are interested in. Two topics cover an introduction to test structure design, measurement, and analysis. The five topics cover the latest update in each field that includes advanced CMOS, Gallium oxide for power devices, CMOS image sensors, 2D/3D Flash memory, and MEMS. The tutorial course will be the best place for many attendees to learn fundamentals on test structures and to catch up on advanced topics in the field.
Tokyo is an endlessly interesting city for everyone. There are many historical places to watch, many artistic places to feel something, many modern and traditional places to find something different from your place, and many places to enjoy eating. Since The University of Tokyo is located in the center of Tokyo, you can easily access the interested places quickly and easily. In addition to the places, the week of the ICMTS 2023 is the typical week that you can enjoy seeing the cherry trees in full bloom.
I look forward to seeing you at the ICMTS 2023 in Tokyo.
Sincerely,
Satoshi Habu
General Chairman
Looking for the best opportunity to present and discuss your ideas and results about test structures, measurements, and characterization. Join the 35th ICMTS conference.
TOPICS
Original papers are solicited presenting new developments in topics relevant to ICMTS, including but not limited to, test structures, measurements, and results, in the following areas:
- Design
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- Methodologies, Verification
- Within-die circuits for process characterization/monitoring
- Design enablement – Characterization and validation of digital and analog libraries
- Devices and Circuit Modeling
- Measurement techniques
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- DC, AC and RF measurements: setup, test and analysis
- Reliability test - including thermal stability, failure analysis, prediction, etc.
- Statistical analysis, variability, throughput increase, smart test strategies
- Use of machine learning and AI in analysis of data sets - parameter extraction etc.
- Wafer probing, within-die measurements, in-line metrology
- Throughput, testing strategies, yield enhancement and process control tests
- Applications
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- Emerging memory technologies (single cell, arrays, and application in neural networks)
- Emerging transistor technologies for digital/analog/power applications
- Photonic devices - silicon integration, new displays (OLED, ?-displays)
- Flexible electronics and sensors (organic and inorganic materials)
- M(N)EMS, actuators, sensors, PV cells and other emerging devices
CONFERENCE
ICMTS is the industry’s only conference that focuses on test structure design, measurement and usage. The single-session format allows for interaction with your fellow participants that’s not practical at larger conferences.A Tutorial Short Course will precede the conference sessions. Several of the best measurement, equipment,
design, and manufacturing experts, will participate to the equipment exhibition and presentations.
A Best Paper award will be presented by the Technical Program Committee. The IEEE Electron Devices Society is the co-sponsor, and all published papers will be submitted for possible inclusion on IEEE Xplore(R)
REGISTRATION FEE
Early bird ; 9th Dec to 20th Feb [ JPY ]| Program | IEEE member | IEEE non member | Student |
|---|---|---|---|
| Tutorial incl. one textbook |
21,000 | 25,000 | 10,000 |
| Technical incl. one proceeding book & one banquet ticket |
44,000 | 52,000 | 26,000 |
| Tutorial + Technical incl. one textbook & one proceeding book & one banquet ticket |
63,000 | 75,000 | 34,000 |
| Extra Baquet Ticket | 10,000 | 10,000 | 10,000 |
| Excursion Tour | 9,800 | 9,800 | 9,800 |
To register, Please visit: https://sec.tobutoptours.co.jp/web/evt/icmts2023/ Excursion tour will be held! If you wish to participate, please also purchase a tour ticket when you register. (You can apply for the tour separately. The application deadline for the excursion tour will be announced shortly.)
Regular ; 21st Feb to 20th March [ JPY ]
| Program | IEEE member | IEEE non member | Student |
|---|---|---|---|
| Tutorial incl. one textbook |
25,000 | 29,000 | 12,000 |
| Technical incl. one proceeding book & one banquet ticket |
49,000 | 57,000 | 30,000 |
| Tutorial + Technical incl. one textbook & one proceeding book & one banquet ticket |
72,000 | 84,000 | 40,000 |
| Extra Baquet Ticket | 10,000 | 10,000 | 10,000 |
| Excursion Tour | 9,800 | 9,800 | 9,800 |
To register, Please visit: https://sec.tobutoptours.co.jp/web/evt/icmts2023/ Excursion tour will be held! If you wish to participate, please also purchase a tour ticket when you register. (You can apply for the tour separately. The application deadline for the excursion tour will be announced shortly.)
On Site ; 27th March on [ JPY ]
| Program | IEEE member | IEEE non member | Student |
|---|---|---|---|
| Tutorial incl. one textbook |
28,000 | 33,000 | 14,000 |
| Technical incl. one proceeding book & one banquet ticket |
54,000 | 62,000 | 33,000 |
| Tutorial + Technical incl. one textbook & one proceeding book & one banquet ticket |
80,000 | 93,000 | 45,000 |
| Extra Baquet Ticket | 10,000 | 10,000 | 10,000 |
| Excursion Tour | 9,800 | 9,800 | 9,800 |
To register, Please visit: https://sec.tobutoptours.co.jp/web/evt/icmts2023/ Excursion tour will be held! If you wish to participate, please also purchase a tour ticket when you register. (You can apply for the tour separately. The application deadline for the excursion tour will be announced shortly.)
LOCATION
U Tokyo Takeda building Google MapSince the year 2007, the ICMTS will be back to The University of Tokyo (we call UTokyo), Japan. Tokyo is one of the must-visit cities of Japan, with relatively young history since 17th century,
and became the real (both political and economic) capital of Japan since 1868.
The miraculous development has been possible due to the inclusive society, with the firm educational system, heading from the University of Tokyo, the first national university of Japan established in 1877.
Certain number of faculties such as Electrical Communication Engineering has established earlier than that : the year 1873, which is only five years after the Meiji revolution. The ECE (Now EE and ICE) department is known as the first Electrical Engineering faculty in the world (the others were mostly Physics department), under the guide of Professor William Ayrton (invited from the University of Glasgow). The venue is Takeda Sentanchi Building, operated by the decedents of Professor Ayrton. On the top floor, we have a 300-guests conference room, where the ICMTS will be held. On the basement, there is a Federal Class 1 Supercleanroom, where over 160 independent research groups are looking for the Next Generation MicroElectronic Devices. Visit tour will be possible upon request.
