Design and test for MEMS vibrational energy harvesters
| Presenter: |
Hiroshi Toshiyoshi |
Institute of Industrial Science, The University of Tokyo |
| Start: |
16:25 (55 minutes) |
Abstract
A vibrational energy harvester is developed using MEMS (microelectromechanical systems) technology to generate more than 1 mW of power from ambient vibrations with sub-gravity levels of acceleration at frequencies around 100 Hz. Electrets or permanent charges are formed on the surface of micro electrodes that generate electrostatically induced current from mechanical vibrations. In this tutorial lecture, we look into an analytical model of power generation using an equivalent circuit model, and discuss a methodology for using electret potential to tune the electromechanical conversion efficiency to maximize output power. We also discuss an automated method to experimentally determine the electret potential.
